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Subject: Re: [DCHAS-L] Molecular Beam Epitaxy Equipment Decontamination
Date: Friday, July 21, 2017 at 10:32:34 PM
Author: Marc Majewski <majmarc**At_Symbol_Here**GMAIL.COM> 		Next by Date:
Subject: [DCHAS-L] Chemical Safety headlines from Google (15 articles)
Date: Mon, 24 Jul 2017 08:16:18 -0400
Author: "Secretary, ACS Division of Chemical Health and Safety"

From: Ken Kretchman <kwkretch**At_Symbol_Here**ncsu.edu>
Subject: Re: [DCHAS-L] Molecular Beam Epitaxy Equipment Decontamination
Date: Sat, 22 Jul 2017 08:08:45 -0400
Reply-To: ACS Division of Chemical Health and Safety <DCHAS-L**At_Symbol_Here**PRINCETON.EDU>
Message-ID: CAOYSQ49-+v83F35AA_3BYjgnmFpCJadRPR_o-AtT62mXYGescg**At_Symbol_Here**mail.gmail.com
In-Reply-To


I lived with MBE and GaAs in a previous life. We had a researcher who felt the need to occasionally clean (scrap walls) on his system. We enclosed the process with plastic to the best of ability, used a HEPA vac to draw negative pressure via one of the ports and put the researcher in PPE. Still messy and I would not call that decon. We also had a unit to donate to a university and wanted to decon it first ..tried decon via dry ice blasting that time and I don't think I would try that one again..

I think Mark makes a good suggestion regarding checking with the vendor.

Catherine..I have not had a chance to peek Larry Gibbs protocol or the Michigan Tech info as we are busy trying to fill our IH and Facilities Safety open positions...

Ken Kretchman
NC State

Ken Kretchman, CIH, CSP Director, Environmental Health and Safety
NC State University / Box 8007 / 2620 Wolf Village Way / Raleigh North Carolina 27695-8007
Email: Ken_Kretchman**At_Symbol_Here**ncsu.edu / Phone: (919).515.6860 / Fax: (919).515.6307

On Fri, Jul 21, 2017 at 10:32 PM, Marc Majewski <majmarc**At_Symbol_Here**gmail.com> wrote:
Catherine,

When I worked at Varian in 88-90' we made MBE equipment and had a service dept that cleaned and repaired the equipment.

Since that time Varian has divided and sold off parts of the company so I don't know if they still manufacture MBE equipment or do service. (INTEVAC may have taken over the MBE product line.)

My suggestion is to ASK THE MANUFACTURER.

In the semiconductor industry it is a common practice to require these kinds of maintenance and decon procedures (and training) from the manufacturer as part of the purchase, installation, and qualification of the equipment before you actually pay for the equipment.

SEMI equipment standards might be a resource as well.

Good luck.

Best Regards,
Marc Majewski
San Francisco State U

On Wed, Jul 12, 2017 at 6:59 PM, Catherine Situma <cns0013**At_Symbol_Here**auburn.edu> wrote:
All,
Does anyone have experience with decontamination of molecular beam epitaxy equipment? This equipment was utilized for synthesis of GaAS, I have looked at the SOP by University of Michigan Flint "MBE Chamber Maintenance" but wanted to check with this group for more input.
Thanks,
Catherine Situma

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